CDASS supplied inexpensive and clean dry air with moisture thoroughly removed and NH3, SOx, organic gases and other gaseous pollutants removed.
● Supplies ultra-low dew point air using dehumidification rotors in three stages in series.
● Supplies clean and dry air (CDA) with dust and inorganic gaseous pollutants containing organic and NOx removed at a dew point temperature of -100℃ (8.7 wt ppb) or less.
● Production and supply of CDA at low cost using dehumidification rotor.
● The running cost is 1/5 to 1/10 compared with compressed air (pressure swing type). There is no worry of asphyxiation unlike nitrogen gas systems. Supplies a large volume of CDA at 15-30 m3/min at atmospheric pressure.
● All-in-one package incorporating heat source equipment.
● Manufactures and supplies CDA with power connection only.
● Uses proven dehumidification rotor.
● ALow cost compared with compressed air (pressure swing type).
● Cheaper and safer than nitrogen gas systems.
* CDASS-mini can be rented.
● Air supply to the air bearing for substrate conveyance in electronic device manufacturing equipment.
● Products that dislike moisture or chemical contamination contained in the air.
● Ideal as a substitute for nitrogen gas in R&D and prototype lines.
● Prevents reticle haze.
● Prevents lens fogging.
● Prevents wafer natural oxidation film.
● Prevents moisture adhesion inside vacuum devices.
● Organic EL production lines.
